Agilent Scroll and Turbo Pump Standard Operating Procedure

Turbo Pump Manual: https://www.agilent.com/cs/library/usermanuals/public/TwisTorr%2074%20FS.pdf

Turbo Pump Rack Controller Manuel: https://www.idealvac.com/files/manuals/Ideal_Vacuum_TwisTorr_74_FS_AG_Rack_Controller_User_Manual.pdf?srsltid=AfmBOopPXQvYBN4x4ZLwyHTx6dXR3sZseduOCj2VxXNt3nLIlEr8g4Ja

For both, only Chapters 16 and 17 are in English.

Pressure Gauge Manuel: https://www.agilent.com/cs/library/usermanuals/public/Inverted%20Magnetron%20Pirani%20Gauge%20Instructions.pdf

IDP 7 Webpage

TwisTorr 74 Webpage

TwisTorr 74 FS Turbo Pump on CF 4.5" Flange

Pressure Gauge General Webpage

FRG702CF35

Installation

1. Connect pressure gauge to vacuum system

2. Potentially add inlet screen. Connect turbo pump to vacuum system/tubing to vacuum system. For the CF 4.5" Flange, tighten the bolts to 20 Nm (we might find out we need to clamp harder)

3. Connect fan to turbo pump

4. Mount the scroll pump onto the platform

5. Connect vacuum tubing from turbo pump to scroll pump

6. Connect cables from the turbo rack controller to the turbo pump, the turbo pump fan, the pressure gauge, and the wall outlet

7. If using 110-125 V, flip the red switch by the power input on the scrool pump and connect the power cable to a wall outlet

Turning the pumps on

0. Make the pressure on both sides of the valve is equal and open up the gate valve if it is not already open

1. Turn on the scroll pump. After 35 seconds, there will likely be a mechanical noise and the pressure will start dropping. The pressure should reach 0.1 Torr or below after ~20 minutes (volume dependent)

2. If the pump has not been turned on in ~3 months, enable the "soft start" on the rack controller: press the top two buttons for 2 seconds and toggle to the pump settings menu. Then toggle with the lower buttons to pump speed. Toggle through the speed digits and reach soft start. Toggle to enable. Scroll through the menu again to ensure it was kept.

3. If its not inserted, add the included female 9 pin D-Sub with pins 3 and 8 shorted into P1 to bypass the interlock

4. Turn on the turbo pump by hitting the start button. It should slowly (15 minutes total time) ramp up to speed (1167 Hz). Some sound and vibration from resonance as the pump speed ramps up is normal.

Turning the pumps off

See the Ion Pump Standard Operating Procedure if using the Ion Pump

If turning off but wish to maintain vacuum:

1. Close the valve

2. Turn off the turbo pump on the turbo rack controller by pressing the start/stop button

3. After the turbo pump stops spinning, turn off the scroll pump

4. To vent the turbo pump and scroll, turn the valve a quarter turn

If turning off and want to vent the entire vacuum chamber:

1. Turn off the turbo pump on the turbo rack controller by pressing the start/stop button

2. After the turbo pump stops spinning, turn off the scroll pump

3. Vent with the up to air valve