Put the exhuast tubing as far away from the vacuum system as possible, preferably outside the laser curtains and door
Plug in the leaker checker power cord into a "dirty" wall outlet
Turn the leak checker on by flipping power switch and let the leak checker go through diagnostics until “stand-by”
Hit vent (3rd button down on left)
Disconnect the top and connect the KF25 hose to the leak checker and to the valve on the vacuum system
Close the vent valve
Hit the large "start" button to pump on tube. The pressure should get to 1E-3 Torr or lower and the top of the screen should have "fine detection". The leak rate should be close to 1E-10 Torr L/s
Once these conditions are met, slowly open the valve to the main chamber body
If possible, valve off the turbo & ion pumps so that the leak checker is the only pump operating
Open up main tank valve
Adjust the upstream of the two black valves
Open up smaller valve on regulator to see a bit of gas
Twist joint at end of hose to release helium
A small puddle of isopropanol can let you tell if helium is coming out
Slowly spray the helium next to various seals on the vacuum chamber. Helium tends to rise so start high, but note the clean room blowers will push the helium down as well.
Wait a few seconds to see if the leak rate rises. If so, try to localize further. Wait for the helium measured to decrease before moving on to new areas.
Shut helium valves
Close valve from tubing to main body
Hit "stop" button
When everything is done spinning, hit "vent" and "close" Note that the hose will expand when venting.
Disconnect hose from vacuum chamber (and leak checker if putting away long term)
Turn off leak checker
Disconnect power cable from wall outlet